What does silicon accelerometers use for proof mass sensing and for rebalancing?(a) Pivot(b) Flexure(c) Metalised wafers(d) Single crystal silicon frameThe question was posed to me in a job interview.This intriguing question comes from Accelerometer topic in division Satellite Radio Navigation& Inertial Navigation of Avionics

What does silicon accelerometers use for proof mass sensing and for re

1.	What does silicon accelerometers use for proof mass sensing and for rebalancing?(a) Pivot(b) Flexure(c) Metalised wafers(d) Single crystal silicon frameThe question was posed to me in a job interview.This intriguing question comes from Accelerometer topic in division Satellite Radio Navigation& Inertial Navigation of Avionics
Answer» RIGHT answer is (c) Metalised wafers To explain I would say: The frame, proof mass and hinges are MADE with SINGLE crystal silicon. Metalised wafers are used to enclose this and also SERVE as electrodes for SENSING proof mass and rebalancing.

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